Semiconductor structures having low resistance paths throughout a wafer

ABSTRACT

A semiconductor structure with low resistance conduction paths and methods of manufacture are disclosed. The method includes forming at least one low resistance conduction path on a wafer, and forming an electroplated seed layer in direct contact with the low resistance conduction path.

FIELD OF THE INVENTION

The invention relates to semiconductor structures and, moreparticularly, to a semiconductor structure with low resistanceconduction paths and methods of manufacture.

BACKGROUND

Metal electro-plating is widely used for multi metal level electronicdevice fabrication. Electro-plating requires a low resistance conductionpath between the electrodes providing the current and the entire surfaceof the device being plated. Resistance between the electrode contactpoint and any portion of the device can result in significantdifferences in the thickness of the plated metal across the device.Accordingly, in order to guarantee uniform plating, thick conductingseed layers are often required, which directly affect the cost andperformance of the device.

SUMMARY

In an aspect of the invention, a method comprises forming at least onelow resistance conduction path on a wafer, and forming an electroplatedseed layer in direct contact with the low resistance conduction path.

In an aspect of the invention, a method comprises: forming at least onelow resistance conduction path comprising at least one metal filled viawithin an insulator layer; and forming an electroplated seed layer on apatterned upper insulator layer, in direct contact with the least onemetal filled via. The forming of the electroplated seed layer comprises:forming the upper insulator layer on the insulator layer; patterning theupper insulator layer to form an opening which exposes the at least onemetal filled via; and forming the electroplated seed layer on a surfaceof the upper insulator layer including within the opening to directlycontact the at least one metal filled via.

In an aspect of the invention, a structure comprises: at least one lowresistance conduction path in a dielectric material, extending to anunderlying substrate; and an electroplated seed layer in direct contactwith the low resistance conduction path, provided on a surface of thedielectric material.

In another aspect of the invention, a design structure tangibly embodiedin a machine readable storage medium for designing, manufacturing, ortesting an integrated circuit is provided. The design structurecomprises the structures of the present invention. In furtherembodiments, a hardware description language (HDL) design structureencoded on a machine-readable data storage medium comprises elementsthat when processed in a computer-aided design system generates amachine-executable representation of the semiconductor structure withlow resistance conduction paths, which comprises the structures of thepresent invention. In still further embodiments, a method in acomputer-aided design system is provided for generating a functionaldesign model of the semiconductor structure with low resistanceconduction paths. The method comprises generating a functionalrepresentation of the structural elements of the semiconductor structurewith low resistance conduction paths.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The present invention is described in the detailed description whichfollows, in reference to the noted plurality of drawings by way ofnon-limiting examples of exemplary embodiments of the present invention.

FIGS. 1-3 show structures and respective processing steps in accordancewith aspects of the present invention;

FIGS. 4 and 5 show structures and respective processing steps inaccordance with additional aspects of the present invention;

FIGS. 6 and 7 show structures and respective processing steps inaccordance with further aspects of the present invention; and

FIG. 8 is a flow diagram of a design process used in semiconductordesign, manufacture, and/or test.

DETAILED DESCRIPTION

The invention relates to semiconductor structures and, moreparticularly, to a semiconductor structure with low resistanceconduction paths and methods of manufacturing. More specifically, thepresent invention provides structures with low resistance conductionpaths, which effectively reduces thickness variability, e.g., crossdevice thickness variation, of electroplating material independent of aseed layer. The low resistance conduction paths allow the ability to usethin, highly resistive seed layers for electroplating of metal lines,etc.

As semiconductor technologies march toward smaller geometry, it isbecoming ever more important to use thinner Cu seed layers. These Cuseed layers are typically formed using electroplating processes, whichexhibit much better electromigration (EM) lifetime than PVD (plasmavapor deposition) Cu seed layers. Also, PVD seed layers cannot pinch offwires or vias, compared to electroplating processes.

By introducing low resistance conduction paths of the present invention,it is now possible to use thinner seed layers, while maintaining metalthickness uniformity in a center of a wafer during electroplatingprocesses. That is, advantageously, by implementing the aspects of thepresent invention, power can be easily transferred from a platingelectrode throughout the whole wafer with thinner seed layers. Thisgreatly reduces the resistance of small metal lines, reduces liner andseed removal processing for RDL (redistribution layer) (polymer definedplating) structures, and reduces plating and chemical mechanicalpolishing (CMP) time. Accordingly, use of the low resistance conductionpaths of the present invention decreases overall resistance of thewafer, increases the electroplating plating rate and hence improvesthickness uniformity in wafer center. Moreover, when BEOL (back end ofthe line) wiring structures are incorporated into electrical currentconduction paths, the seed layer thickness of selective platingprocesses (e.g., RDL) can be minimized and hence less amount of seedremoval is required.

In the present invention, the low resistance conduction paths can beprovided by, e.g., deep vias, through silicon vias (TSV), or large metalstructures (back end of the line (BEOL) wiring structures). Inembodiments, the low resistance conduction paths can be provided inunused space in the dicing channels in order to convert this space towire paths from the electrode (e.g., edge of wafer) throughout thewafer. This is especially effective with RF technologies due to thickwire levels used for power transfer and induction. Additionally, groundor power strips (wiring structures) within chip interiors can bedesigned and connected to accomplish the same objective such thatelectrical current can be more evenly distributed within chip interiors.The low resistance conduction paths can also be provided in regionsbetween electronic devices and/or within dicing channels and/or insidechip interiors.

The structures of the present invention can be manufactured in a numberof ways using a number of different tools. In general, though, themethodologies and tools are used to form structures with dimensions inthe micrometer and nanometer scale. The methodologies, i.e.,technologies, employed to manufacture the structures of the presentinvention have been adopted from integrated circuit (IC) technology. Forexample, the structures of the present invention are built on wafers andare realized in films of material patterned by photolithographicprocesses on the top of a wafer. In particular, the fabrication of thestructures of the present invention uses three basic building blocks:(i) deposition of thin films of material on a substrate, (ii) applying apatterned mask on top of the films by photolithographic imaging, and(iii) etching the films selectively to the mask.

FIG. 1 shows a structure 10 comprising a substrate 12. The substrate 12can be, for example, a silicon substrate; although other semiconductormaterials are also contemplated by the present invention. Inembodiments, the substrate 12 can have a thickness of about 700 micronsto about 2 mm, depending on the design criteria. It should be understoodby those of skill in the art that other dimensions can also be used withthe present invention and that the dimensions of the substrate 12 shouldnot be considered a limiting feature of the present invention. A passivestructure or active device 14 can be fabricated on the substrate 12. Inembodiments, the active device can be a transistor, e.g., FET; whereas,the passive structure can be a wiring structure, resistor, etc., all ofwhich are fabricated in a conventional manner such that furtherexplanation is not required for an understanding of the invention.

Still referring to FIG. 1, an interlevel dielectric material 16 isdeposited on the substrate 12 using conventional deposition processes,e.g., chemical vapor deposition (CVD). In embodiments, the interleveldielectric material 16 can be SiO₂; although other insulator materialsare also contemplated by the present invention. The interleveldielectric material 16 can be planarized using conventional CMPprocesses.

One or more vias 18 are formed through the interlevel dielectricmaterial 16 and into the substrate 12 using conventional lithography andetching processes. By way of example, a photoresist can be deposited onthe interlevel dielectric material 16, which is then exposed to light toform a pattern. The vias 18 can be formed through the pattern using areactive ion etch (RIE) with appropriate etch chemistries for theinterlevel dielectric material 16 and the substrate 12. In embodiments,the depth of the vias 18 can range from about 5 microns to about 200microns, and the width or diameter of the vias 18 can range from about0.5 microns to about 50 microns, depending on the thickness of thesubstrate 12, design criteria, etc. After the etching process, theresist can be removed using, for example, an oxygen ashing process. Thevias 18 can be located within the dicing channel (scribe line), can bepart of a crackstop guard ring or within the interior space of the chip,if space is available.

As shown in FIG. 2, the vias are filled with material to form a lowresistance path 18 a. By way of one illustrative example, an oxidematerial is deposited on the sidewalls of the vias using a PlasmaEnhanced CVD (PECVD) process or sub atmospheric CVD process. The oxidematerial can be deposited to a thickness of about 1000 Å to about 5000Å; although other thicknesses are also contemplated by the presentinvention. An adhesion layer, e.g., Ta or Ti, is deposited on the oxidematerial to a thickness of about 100 Å to about 1000 Å, usingconventional sputtering techniques. A copper seed layer is depositing onthe adhesion layer to a depth of about 1000 Å to about 1 micron, usingconventional sputtering techniques. (The oxide material, adhesion layerand seed layer are represented by reference numeral 20.) A coppermaterial 22 is deposited in the remaining unfilled portions of the viausing an electroplating process. It should be understood by those ofordinary skill in the art that other conductive materials (metals ormetal alloys) can be deposited into the via. A top surface of the filledvia then undergoes a polishing process, e.g., CMP.

In FIG. 3, an interlevel dielectric material 23 is deposited on theinterlevel dielectric material 16 and over the low resistance paths(e.g., filled vias) 18 a. The interlevel dielectric material 23 can beSiO₂; although other insulator materials are also contemplated by thepresent invention. The interlevel dielectric material 23 can beplanarized using conventional CMP processes, and patterned to formopenings 24 a, 24 b. In embodiments, the opening 24 a exposes theunderlying conductive material of the low resistance paths 18 a. Thepatterning can be provided by lithography and etching processes, asalready described herein.

Still referring to FIG. 3, a seed layer and barrier layer 26 are thenformed on the interlevel dielectric material 23 including on thesidewalls and bottom of the openings 24 a, 24 b. In this way, the seedlayer and barrier layer 26 are in direct contact with the conductivematerial of the vias 18 a. The seed layer is preferably copper (Cu). Inembodiments, the Cu seed layer is a thin, highly resistive seed layerused for electroplating of metal lines or other device fabrication, etc.For example, the seed layer can have a thickness of about 10 nm. Thebarrier layer can be, for example, Ta, TaN or a bilayer of Ta/TaN,deposited using conventional deposition processes. An electroplatingprocess is performed to form a metal layer on the seed layer 26.

As should be understood by those of skill in the art, the low resistanceconduction paths 18 a can be about 10 micron tall, with a resultantresistance of about 2 mΩ/

. The Cu seed layer can be about 10 nm in thickness with a resistance ofabout 18 Ω/

. Assuming a 0.5% chip area designed with the low resistance conductionpaths 18 a, the resistive path of the wafer can be decreased to about0.4 Ω/

, which is about 45× lower resistance than a conventional wafer.Accordingly, by implementing the low resistance conduction paths, it isnow possible to use thinner seed layers which greatly reduces theresistance of small metal lines, reduces liner and seed removalprocessing for RDL (redistribution layer) (polymer defined plating)structures, reduces plating and chemical mechanical polishing (CMP)time, and reduces cross device thickness variation of electroplatingmaterial in a center of a wafer. As to the latter point, the lowresistance conduction paths (i) decrease overall resistance of thewafer, (ii) increase the electroplating plating rate and hence (ii)improves thickness uniformity in wafer center.

FIGS. 4 and 5 show structures and respective processing steps inaccordance with additional aspects of the present invention. Morespecifically, FIG. 4 shows a structure 10′ comprising a substrate 12composed of silicon; although other semiconductor materials are alsocontemplated by the present invention. In embodiments, the substrate 12can have a thickness of about 700 microns to about 2 mm, depending onthe design criteria; however, these dimensions should not be considereda limiting feature of the present invention. A passive structure oractive device 14 can be fabricated on the substrate 12 as described withrespect to FIG. 1.

Still referring to FIG. 4, a silicide layer 28 is formed on thesubstrate 12 using conventional processes. For example, the silicidelayer 28 can be formed by the reaction of a thin metal film (e.g., Ni,Co or Ti) with silicon through an annealing process. In embodiments, thesilicide layer 28 can be provided in the dicing channel or in the chiparea, itself, depending on available space, and will act as a conductionpath for electroplating.

An interlevel dielectric material 16 is deposited on the silicide layer28 using conventional deposition processes, e.g., CVD. In embodiments,the interlevel dielectric material 16 can be SiO₂; although otherinsulator materials are also contemplated by the present invention,e.g., BPSG (Boron Phosphate Silicate Glass). The interlevel dielectricmaterial 16 can be planarized using conventional CMP processes andthereafter patterned to form one or more contacts 30, e.g., lowresistance paths, contacting the silicide layer 28. The contacts 30 canbe located within the dicing channel (scribe line), can be part of acrackstop guard ring or within the interior space of the chip, if spaceis available. In embodiments, the contacts 30 can range from about 0.5microns to about 1.5 microns in depth, and from about 0.1 microns toabout 2 microns in width.

The contacts 30 can be formed using conventional deposition, lithographyand etching processes as already described herein. For example, afterlithography and etching processes, the resulting vias are filled withmetal material to form the contacts, e.g., the low resistance conductionpaths. By way of one illustrative example, a conductive liner 20′, e.g.,Ti or TiN, is formed on sidewalls of the via using a sputtering or CVDprocess, followed by a deposition of tungsten or copper material 22′(using, e.g., a CVD process). The contacts 30 then undergo a polishingprocess, e.g., CMP.

In FIG. 5, an interlevel dielectric material 23 is deposited on theinterlevel dielectric material 16 and over the low resistance paths(e.g., filled contacts) 30. The interlevel dielectric material 23 can beSiO₂; although other insulator materials are also contemplated by thepresent invention. The interlevel dielectric material 23 can beplanarized using conventional CMP processes, and patterned to formopenings 24 a, 24 b. In embodiments, the opening 24 a exposes theunderlying conductive material of the contacts 30. A seed layer andbarrier layer (both represented at reference numeral 26) are formed onthe interlevel dielectric material 23, and within the openings 24 a, 24b. In this way, the seed layer, e.g., Cu, and barrier layer, e.g., Ta,TaN or a bilayer of Ta/TaN, are in direct contact with the conductivematerial of the contacts 30. An electroplating process is performed toform a metal layer on the seed layer 26.

As should be understood by those of skill in the art, the contacts 30 incombination with the silicide layer 28 are representative of lowresistance conduction paths. In this example, the Cu seed layer 26 canhave a thickness of about 10 nm with a resistance of about 18 mΩ/

. A Ni silicide layer has a resistance of about 3 mΩ/

. Assuming a 20% chip area designed with the Ni silicide layer, theresistive path of the wafer can be decreased to about 15 mΩ/

, which is about 50% lower resistance than a conventional wafer. Assuch, the low resistance conduction paths (i) decrease overallresistance of the wafer, (ii) increase the electroplating plating rateand hence (ii) improves thickness uniformity in wafer center.

FIGS. 6 and 7 show structures and respective processing steps inaccordance with further aspects of the present invention. Morespecifically, FIG. 6 shows a structure 10″ comprising a substrate 12composed of silicon; although other semiconductor materials are alsocontemplated by the present invention. In embodiments, the substrate 12can have a thickness of about 700 microns to about 2 mm, depending onthe design criteria; however, these dimensions should not be considereda limiting feature of the present invention. A plurality of anycombination of passive structures and active devices 14 can befabricated on the substrate 12 as described with respect to FIG. 1. Asilicide layer 28 is formed on the substrate 12 using conventionalprocesses. For example, the silicide layer 28 can be formed by thereaction of a thin metal film (e.g., Ni) with silicon through anannealing process. In embodiments, the silicide layer 28 can act as aconduction path for electroplating.

An interlevel dielectric material 16 is deposited on the substrate 12using conventional deposition processes, e.g., CVD. In embodiments, theinterlevel dielectric material 16 can be SiO₂; although other insulatormaterials are also contemplated by the present invention. One or moremetal wiring and interconnects 32 are formed in the interleveldielectric material 16. The metal wiring and interconnects 32 can beformed using conventional deposition, lithography and etching processesas already described herein. For example, after each layer of interleveldielectric material 16 is deposited and planarized, a lithography,etching and deposition process can be performed to form the metal wiringand interconnects 32 at individual metal layers, Mx The metal wiring andinterconnects 32 can be formed from any conductive material such as, forexample, copper or tungsten.

Still referring to FIG. 6, a seed layer and barrier layer 34 are formedon the interlevel dielectric material 16, contacting the underlyingmetal wiring and interconnects 32. The seed layer, e.g., Cu, is indirect contact with the conductive material of the metal wiring andinterconnects 32. In embodiments, the seed layer 34 has a thickness ofabout 500 Å to about 1 micron, which is considerably thinner than usedwith a conventional device. A resist 36 is deposited on the interleveldielectric material 16 and over the seed layer and barrier layer 34. Theresist layer 36 is then patterned to form openings 38.

In FIG. 7, a metal wiring 40 is formed in contact with the seed layer34. The metal wiring 40 can be an embedded BEOL wiring structure insidethe chip interior for chip power distribution and grounding, andsimultaneously providing a lower Rs path for electroplating processes.The metal wiring 40 can be formed using any conventional BEOL process,e.g., preferably electroplating. In embodiments, the metal wiring 40 canbe about 2 microns to about 100 microns in thickness; although otherdimensions are also contemplated by the present invention.

After formation of the metal wiring 40, the resist can be removed by aconventional oxygen ashing or stripping process. The exposed portions ofthe seed layer and barrier layer 34 can also be removed by a short wetetch process. This short wet etch will not remove the metal wiring 40due to its overall thickness compared to the seed layer and barrierlayer 34, as should be understood by those of skill in the art. Asshould be further understood by those of skill in the art, the use ofthe BEOL Mx wires, e.g., metal wires 40, allows a reduction in thethickness of the seed layer 34. This reduced thickness, in turn, resultsin easier removal of the seed layer in subsequent processing steps, andalso less lateral CD loss. Also, the low resistance conduction paths,e.g., metal wiring, (i) decrease overall resistance of the wafer, (ii)increase the electroplating plating rate and hence (ii) improvesthickness uniformity in wafer center.

FIG. 8 is a flow diagram of a design process used in semiconductordesign, manufacture, and/or test. FIG. 8 shows a block diagram of anexemplary design flow 900 used for example, in semiconductor IC logicdesign, simulation, test, layout, and manufacture. Design flow 900includes processes, machines and/or mechanisms for processing designstructures or devices to generate logically or otherwise functionallyequivalent representations of the design structures and/or devicesdescribed above and shown in FIGS. 1-7. The design structures processedand/or generated by design flow 900 may be encoded on machine-readabletransmission or storage media to include data and/or instructions thatwhen executed or otherwise processed on a data processing systemgenerate a logically, structurally, mechanically, or otherwisefunctionally equivalent representation of hardware components, circuits,devices, or systems. Machines include, but are not limited to, anymachine used in an IC design process, such as designing, manufacturing,or simulating a circuit, component, device, or system. For example,machines may include: lithography machines, machines and/or equipmentfor generating masks (e.g. e-beam writers), computers or equipment forsimulating design structures, any apparatus used in the manufacturing ortest process, or any machines for programming functionally equivalentrepresentations of the design structures into any medium (e.g. a machinefor programming a programmable gate array).

Design flow 900 may vary depending on the type of representation beingdesigned. For example, a design flow 900 for building an applicationspecific IC (ASIC) may differ from a design flow 900 for designing astandard component or from a design flow 900 for instantiating thedesign into a programmable array, for example a programmable gate array(PGA) or a field programmable gate array (FPGA) offered by Altera® Inc.or Xilinx® Inc.

FIG. 8 illustrates multiple such design structures including an inputdesign structure 920 that is preferably processed by a design process910. Design structure 920 may be a logical simulation design structuregenerated and processed by design process 910 to produce a logicallyequivalent functional representation of a hardware device. Designstructure 920 may also or alternatively comprise data and/or programinstructions that when processed by design process 910, generate afunctional representation of the physical structure of a hardwaredevice. Whether representing functional and/or structural designfeatures, design structure 920 may be generated using electroniccomputer-aided design (ECAD) such as implemented by a coredeveloper/designer. When encoded on a machine-readable datatransmission, gate array, or storage medium, design structure 920 may beaccessed and processed by one or more hardware and/or software moduleswithin design process 910 to simulate or otherwise functionallyrepresent an electronic component, circuit, electronic or logic module,apparatus, device, or system such as those shown in FIGS. 1-7. As such,design structure 920 may comprise files or other data structuresincluding human and/or machine-readable source code, compiledstructures, and computer-executable code structures that when processedby a design or simulation data processing system, functionally simulateor otherwise represent circuits or other levels of hardware logicdesign. Such data structures may include hardware-description language(HDL) design entities or other data structures conforming to and/orcompatible with lower-level HDL design languages such as Verilog andVHDL, and/or higher level design languages such as C or C++.

Design process 910 preferably employs and incorporates hardware and/orsoftware modules for synthesizing, translating, or otherwise processinga design/simulation functional equivalent of the components, circuits,devices, or logic structures shown in FIGS. 1-7 to generate a netlist980 which may contain design structures such as design structure 920.Netlist 980 may comprise, for example, compiled or otherwise processeddata structures representing a list of wires, discrete components, logicgates, control circuits, I/O devices, models, etc. that describes theconnections to other elements and circuits in an integrated circuitdesign. Netlist 980 may be synthesized using an iterative process inwhich netlist 980 is resynthesized one or more times depending on designspecifications and parameters for the device. As with other designstructure types described herein, netlist 980 may be recorded on amachine-readable data storage medium or programmed into a programmablegate array. The medium may be a non-volatile storage medium such as amagnetic or optical disk drive, a programmable gate array, a compactflash, or other flash memory. Additionally, or in the alternative, themedium may be a system or cache memory, buffer space, or electrically oroptically conductive devices and materials on which data packets may betransmitted and intermediately stored via the Internet, or othernetworking suitable means.

Design process 910 may include hardware and software modules forprocessing a variety of input data structure types including netlist980. Such data structure types may reside, for example, within libraryelements 930 and include a set of commonly used elements, circuits, anddevices, including models, layouts, and symbolic representations, for agiven manufacturing technology (e.g., different technology nodes, 32 nm,45 nm, 90 nm, etc.). The data structure types may further include designspecifications 940, characterization data 950, verification data 960,design rules 970, and test data files 985 which may include input testpatterns, output test results, and other testing information. Designprocess 910 may further include, for example, standard mechanical designprocesses such as stress analysis, thermal analysis, mechanical eventsimulation, process simulation for operations such as casting, molding,and die press forming, etc. One of ordinary skill in the art ofmechanical design can appreciate the extent of possible mechanicaldesign tools and applications used in design process 910 withoutdeviating from the scope and spirit of the invention. Design process 910may also include modules for performing standard circuit designprocesses such as timing analysis, verification, design rule checking,place and route operations, etc.

Design process 910 employs and incorporates logic and physical designtools such as HDL compilers and simulation model build tools to processdesign structure 920 together with some or all of the depictedsupporting data structures along with any additional mechanical designor data (if applicable), to generate a second design structure 990.

Design structure 990 resides on a storage medium or programmable gatearray in a data format used for the exchange of data of mechanicaldevices and structures (e.g. information stored in a IGES, DXF,Parasolid XT, JT, DRG, or any other suitable format for storing orrendering such mechanical design structures). Similar to designstructure 920, design structure 990 preferably comprises one or morefiles, data structures, or other computer-encoded data or instructionsthat reside on transmission or data storage media and that whenprocessed by an ECAD system generate a logically or otherwisefunctionally equivalent form of one or more of the embodiments of theinvention shown in FIGS. 1-7. In one embodiment, design structure 990may comprise a compiled, executable HDL simulation model thatfunctionally simulates the devices shown in FIGS. 1-7.

Design structure 990 may also employ a data format used for the exchangeof layout data of integrated circuits and/or symbolic data format (e.g.information stored in a GDSII (GDS2), GL1, OASIS, map files, or anyother suitable format for storing such design data structures). Designstructure 990 may comprise information such as, for example, symbolicdata, map files, test data files, design content files, manufacturingdata, layout parameters, wires, levels of metal, vias, shapes, data forrouting through the manufacturing line, and any other data required by amanufacturer or other designer/developer to produce a device orstructure as described above and shown in FIGS. 1-7. Design structure990 may then proceed to a stage 995 where, for example, design structure990: proceeds to tape-out, is released to manufacturing, is released toa mask house, is sent to another design house, is sent back to thecustomer, etc.

The method(s) as described above is used in the fabrication ofintegrated circuit chips. The resulting integrated circuit chips can bedistributed by the fabricator in raw wafer form (that is, as a singlewafer that has multiple unpackaged chips), as a bare die, or in apackaged form. In the latter case the chip is mounted in a single chippackage (such as a plastic carrier, with leads that are affixed to amotherboard or other higher level carrier) or in a multichip package(such as a ceramic carrier that has either or both surfaceinterconnections or buried interconnections). In any case the chip isthen integrated with other chips, discrete circuit elements, and/orother signal processing devices as part of either (a) an intermediateproduct, such as a motherboard, or (b) an end product. The end productcan be any product that includes integrated circuit chips, ranging fromtoys and other low-end applications to advanced computer products havinga display, a keyboard or other input device, and a central processor.

The descriptions of the various embodiments of the present inventionhave been presented for purposes of illustration, but are not intendedto be exhaustive or limited to the embodiments disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to best explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdisclosed herein.

What is claimed is:
 1. A method, comprising: forming a silicide layerdirectly on a substrate; forming at least one low resistance conductionpath in an interlevel dielectric layer above the silicide layer, whereinthe at least one low resistance conduction path is located within adicing channel; forming an active device on the substrate and in contactwith the silicide layer; forming a barrier layer in direct contact withthe low resistance conduction path; forming an electroplated seed layerin direct contact with the barrier layer; forming a second interleveldielectric layer over the interlevel dielectric layer; patterning thesecond interlevel dielectric layer to form a first opening exposingconductive material within the at least one low resistance conductionpath; and patterning the second interlevel dielectric layer to form asecond opening above the active device, wherein the at least one lowresistance conduction path comprises a plurality of separate vias,wherein the first opening extends over the plurality of vias, whereinforming the barrier layer comprises forming the barrier layer onsidewalls and a bottom of the first opening such that the barrier layeris formed over the plurality of vias, and wherein forming the barrierlayer comprises forming the barrier layer on sidewalls and a bottom ofthe second opening.
 2. The method of claim 1, wherein the at least onelow resistance conduction path is provided into the interleveldielectric material and the low resistance conduction path is in contactwith the silicide layer.
 3. The method of claim 1, wherein the silicidelayer is formed at a junction between the interlevel dielectric materialand an underlying substrate.
 4. The method of claim 1, wherein theforming at least one low resistance conduction path comprises etching aplurality of vias into the interlevel dielectric material to thesilicide layer and filling the plurality of vias with a metal materialto form metal contacts in direct contact with the silicide layer.
 5. Themethod of claim 1, wherein the silicide layer is formed by reaction of athin metal film with silicon through an annealing process.
 6. The methodof claim 1, wherein the silicide layer is formed in a chip area.
 7. Themethod of claim 1, wherein the at least one low resistance conductionpath is part of a crackstop guard ring.
 8. The method of claim 1,wherein the at least one low resistance conduction path is formed byfilling a via with a conductive liner on sidewalls of the via using asputtering or CVD process, followed by a deposition of tungsten orcopper material.
 9. The method of claim 1, wherein the silicide layer isformed in a dicing channel.
 10. The method of claim 1, wherein the seedlayer is copper.
 11. The method of claim 1, wherein the interleveldielectric layer is directly on and contacting a first part of thesilicide layer, and the low resistance conductive path is directly onand contacting a second portion of the silicide layer.
 12. The method ofclaim 1, wherein the silicide layer is a conduction path forelectroplating.